Comparative study of current-voltage characteristics of Ni and Ni(Pt)- alloy silicided p+/n diodes

• Main Authors: Mangelinck, D., Lahiri, S. K., Chi, Dong Zhi, Lee, Pooi See, Pey, Kin Leong
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: https://hdl.handle.net/10356/79897; http://hdl.handle.net/10220/8105
• Institution: Nanyang Technological University

A comparative study of the I –V characteristics of p+/n diodes silicided with a pure Ni and Ni(Pt) alloy has been performed. Higher saturation currents as well as abnormal reverse I –V characteristics were observed for some of the diodes which were silicided with pure Ni at 700 °C while good I –V ch...