Molecular adhesion controlled microelectromechanical memory device for harsh environment data storage
This work demonstrates a cantilever based electrostatic microelectromechanical system device operating as a memory element. Volatile and non-volatile functions are engineered by manipulating molecular adhesion force through contact dimples and restoring force using the cantilever design. For non-vol...
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2015
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/81211 http://hdl.handle.net/10220/39210 |
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Institution: | Nanyang Technological University |
Language: | English |
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