Microstructure and mechanical properties of Cu-containing amorphous carbon nanocomposite thin films by a hybrid deposition technique

• Main Authors: Luo, Jingying, Sun, Deen, Zhang, Sam, Qian, Haixia, Huang, Jiamu
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2019
• Subjects: Filter Cathodic Vacuum Arc; Magnetron Sputtering; Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/84626; http://hdl.handle.net/10220/49151
• Institution: Nanyang Technological University

Cu-containing amorphous carbon (a-C:Cu) films were deposited on Si (100) substrate by a hybrid process where co-operating of a filter cathodic vacuum arc (FCVA) and a magnetron sputtering (MS). Cu content was tuned by changing the Cu MS power density from 0 to 4.93 W/cm2. The results show that metal...