Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers

• Main Authors: Yang, FaJun, Qiao, Yan, Gao, KaiZhou, Wu, NaiQi, Zhu, YuTing, Simon, Ian Ware, Su, Rong
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2018
• 主題: Wafer Manufacturing; DRNTU::Engineering::Electrical and electronic engineering; Cluster Tools
• 在線閱讀: https://hdl.handle.net/10356/90205; http://hdl.handle.net/10220/47191
• 機構: Nanyang Technological University

In wafer manufacturing, with the shrinking down of wafer lot size, cluster tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes, including start-up and close-down processes. In the existing work, optimal scheduling of start-up proc...