Determination of material parameters from regions close to the collector using electron beam-induced current

• Main Authors: Wu, Dethau., Ong, Vincent K. S.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/90975; http://hdl.handle.net/10220/5341
• Institution: Nanyang Technological University

The conventional method of extracting the minority carrier diffusion length using the electron beam-induced current (EBIC) technique requires that the electron beam be placed at region more than two diffusion lengths away from the collector. The EBIC signals obtained under this condition usually has...