A comparative study on the dielectric functions of isolated Si nanocrystals and densely-stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation

Both isolated Si nanocrystals (nc-Si) dispersedly distributed in a SiO2 matrix and densely stacked nc-Si layers embedded in SiO2 have been synthesized with the ion implantation technique followed by high temperature annealing. The dielect...

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Bibliographic Details
Main Authors: Ding, Liang, Chen, Tupei, Liu, Yang, Liu, Yu Chan
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/91068
http://hdl.handle.net/10220/6938
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Institution: Nanyang Technological University
Language: English
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