White light single-shot interferometry with colour CCD camera for optical inspection of microsystems

• Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit, Nandigana, Krishna Mohan, Prasad, Mahendra
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2015
• Subjects: DRNTU::Science::Medicine::Biomedical engineering
• Online Access: https://hdl.handle.net/10356/93716; http://hdl.handle.net/10220/38386
• Institution: Nanyang Technological University

White light interferometry is a well-established optical tool for surface metrology of reflective samples. In this work, we discuss a single-shot white light interferometer based on single-chip color CCD camera and Hilbert transformation. The approach makes the measurement dynamic, faster, easier...