Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy

Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also...

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Main Authors: Li, Shiguang, Liu, Jing, Nguyen, Nam-Trung, Fang, Zhong Ping, Yoon, Soon Fatt
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2012
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Online Access:https://hdl.handle.net/10356/94260
http://hdl.handle.net/10220/7879
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-942602020-03-07T14:02:44Z Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy Li, Shiguang Liu, Jing Nguyen, Nam-Trung Fang, Zhong Ping Yoon, Soon Fatt School of Electrical and Electronic Engineering DRNTU::Engineering::Mechanical engineering Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal microscopy and intensity differentiation algorithm to obtain the complete three-dimensional profile of the buried, undercut structures in microfluidic devices, which are made by the soft lithography technique and bonded by the oxygen plasma method. The impact of material wettability and the refractive index (n) mismatch among the liquid, samples, cover layer, and objective on the measurement accuracy are experimentally investigated. Published version 2012-05-11T06:47:00Z 2019-12-06T18:53:25Z 2012-05-11T06:47:00Z 2019-12-06T18:53:25Z 2009 2009 Journal Article Li, S. G., Liu, J., Nguyen, N. T., Fang, Z. P., & Yoon, S. F. (2009). Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy. Applied Optics, 48(33), 6432-6441. https://hdl.handle.net/10356/94260 http://hdl.handle.net/10220/7879 10.1364/AO.48.006432 en Applied optics © 2009 Optical Society of America. This paper was published in Applied Optics and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at DOI: [http://dx.doi.org/10.1364/AO.48.006432].  One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 32 p. application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Li, Shiguang
Liu, Jing
Nguyen, Nam-Trung
Fang, Zhong Ping
Yoon, Soon Fatt
Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
description Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal microscopy and intensity differentiation algorithm to obtain the complete three-dimensional profile of the buried, undercut structures in microfluidic devices, which are made by the soft lithography technique and bonded by the oxygen plasma method. The impact of material wettability and the refractive index (n) mismatch among the liquid, samples, cover layer, and objective on the measurement accuracy are experimentally investigated.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Li, Shiguang
Liu, Jing
Nguyen, Nam-Trung
Fang, Zhong Ping
Yoon, Soon Fatt
format Article
author Li, Shiguang
Liu, Jing
Nguyen, Nam-Trung
Fang, Zhong Ping
Yoon, Soon Fatt
author_sort Li, Shiguang
title Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
title_short Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
title_full Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
title_fullStr Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
title_full_unstemmed Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
title_sort measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
publishDate 2012
url https://hdl.handle.net/10356/94260
http://hdl.handle.net/10220/7879
_version_ 1681049472703922176