Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy

• المؤلفون الرئيسيون: Li, Shiguang, Liu, Jing, Nguyen, Nam-Trung, Fang, Zhong Ping, Yoon, Soon Fatt
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Mechanical engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/94260; http://hdl.handle.net/10220/7879
• المؤسسة: Nanyang Technological University

Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also...