Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy

• Main Authors: Li, Shiguang, Liu, Jing, Nguyen, Nam-Trung, Fang, Zhong Ping, Yoon, Soon Fatt
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/94260; http://hdl.handle.net/10220/7879
• Institution: Nanyang Technological University

Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also...