Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also...
Saved in:
Main Authors: | Li, Shiguang, Liu, Jing, Nguyen, Nam-Trung, Fang, Zhong Ping, Yoon, Soon Fatt |
---|---|
Other Authors: | School of Electrical and Electronic Engineering |
Format: | Article |
Language: | English |
Published: |
2012
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/94260 http://hdl.handle.net/10220/7879 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
Similar Items
-
Divided-aperture technique for fluorescence confocal microscopy through scattering media
by: Gong, W., et al.
Published: (2014) -
Confocal laser scanning microscopy of dextran-rice starch mixtures
by: Piyada Achayuthakan, et al.
Published: (2018) -
NIR-II fluorescence in vivo confocal microscopy with aggregation-induced emission dots
by: YU, W, et al.
Published: (2019) -
Volume processing of fluorescent laser confocal microscopic cellular images
by: Chandrasekaran Indhumathi
Published: (2011) -
Cytosolic calcium imaging by confocal laser scanning microscopy: Applications in medicine
by: Bay, B.H.
Published: (2012)