Formation of SrTiO3 nanocrystals in amorphous Lu2O3 high-k gate dielectric for floating gate memory application
We have developed a method based upon pulsed laser deposition to produce SrTiO3 nanocrystals embedded in amorphous Lu2O3 high-k dielectric. The high resolution transmission electron microscopy study revealed the complete isolation of SrTiO3 nanocrystals embedded in Lu2O...
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| Main Authors: | , , , , |
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| 其他作者: | |
| 格式: | Article |
| 語言: | English |
| 出版: |
2012
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| 主題: | |
| 在線閱讀: | https://hdl.handle.net/10356/94591 http://hdl.handle.net/10220/8013 |
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| 機構: | Nanyang Technological University |
| 語言: | English |
| 總結: | We have developed a method based upon pulsed laser deposition to produce SrTiO3 nanocrystals
embedded in amorphous Lu2O3 high-k dielectric. The high resolution transmission electron
microscopy study revealed the complete isolation of SrTiO3 nanocrystals embedded in Lu2O3
matrix with 4 nm diameter and well distributed with an area density estimated to be about 8x
10^11 cm−2. A pronounced capacitance-voltage hysteresis is observed with a memory window of
~1.5 V under the 6 V programming. In addition, the retention characteristics are tested to be
robust. |
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