Formation of SrTiO3 nanocrystals in amorphous Lu2O3 high-k gate dielectric for floating gate memory application

We have developed a method based upon pulsed laser deposition to produce SrTiO3 nanocrystals embedded in amorphous Lu2O3 high-k dielectric. The high resolution transmission electron microscopy study revealed the complete isolation of SrTiO3 nanocrystals embedded in Lu2O...

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Bibliographic Details
Main Authors: Yuan, C. L., Darmawan, P., Setiawan, Y., Lee, Pooi See, Ma, Jan
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/94591
http://hdl.handle.net/10220/8013
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Institution: Nanyang Technological University
Language: English
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