Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides

• المؤلفون الرئيسيون: Mangelinck, D., Osipowicz, T., See, A., Lee, Pooi See, Pey, Kin Leong, Shen, Zexiang, Ding, Jun
• مؤلفون آخرون: School of Materials Science & Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Materials
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/94700; http://hdl.handle.net/10220/8060

The formation of Ni silicides has been successfully monitored by Raman spectroscopy. Ni silicides formed at different annealing temperatures using rapid thermal annealing were analyzed using Rutherford backscattering spectroscopy and X-ray diffraction. Raman spectroscopy was further us...