Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor

Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor

Titanium nitride (TiN)/nickel (Ni) composite coatings were synthesized by plasma assisted metal-organic chemical vapour deposition (PAMOCVD) using organo-metallic and metal-organic complexes namely dichlorobis( 5- cyclopentadienyl)titanium (IV) for titanium and N,N'-ethylene-bis(2,4-pentanedion...

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Bibliographic Details
Main Authors: Maiyalagan, Thandavarayan, Arockiasamy, S., Kuppusami, P., Mallika, C., Nagaraja, K. S.
Other Authors: School of Chemical and Biomedical Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/95842
http://hdl.handle.net/10220/11352
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Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/95842
http://hdl.handle.net/10220/11352

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