Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor
Titanium nitride (TiN)/nickel (Ni) composite coatings were synthesized by plasma assisted metal-organic chemical vapour deposition (PAMOCVD) using organo-metallic and metal-organic complexes namely dichlorobis( 5- cyclopentadienyl)titanium (IV) for titanium and N,N'-ethylene-bis(2,4-pentanedion...
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sg-ntu-dr.10356-958422020-03-07T11:35:35Z Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor Maiyalagan, Thandavarayan Arockiasamy, S. Kuppusami, P. Mallika, C. Nagaraja, K. S. School of Chemical and Biomedical Engineering Titanium nitride (TiN)/nickel (Ni) composite coatings were synthesized by plasma assisted metal-organic chemical vapour deposition (PAMOCVD) using organo-metallic and metal-organic complexes namely dichlorobis( 5- cyclopentadienyl)titanium (IV) for titanium and N,N'-ethylene-bis(2,4-pentanedion-iminoato)nickel(II) for nickel. The growth of such films was investigated in nitrogen (N2) plasma environment in the substrate temperature range of 450- 550ºC at a deposition pressure of 0.5-1 mbar. Prior to the deposition of films, the Ti precursor was subjected to the equilibrium vapour pressure measurements by employing TG/DTA in transpiration mode, which led to the value of 109.2 ± 5.6 kJ mol-1 for the standard enthalpy of sublimation (ΔHo sub). The phase identification using glancing incidence x-ray diffraction showed Ni/TiN is a nanocomposite coating containing nanocrystals of Ni and TiN with face centered cubic structure. Scanning electron microscopy revealed a uniform surface morphology of the films, while chemical analysis by energy dispersive analysis confirmed the presence of titanium, nickel and nitrogen in the composite films. 2013-07-15T02:08:43Z 2019-12-06T19:22:15Z 2013-07-15T02:08:43Z 2019-12-06T19:22:15Z 2012 2012 Journal Article Arockiasamy, S., Maiyalagan, T., Kuppusami, P., Mallika, C.,& Nagaraja, K. (2012). Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor. Micro and nanosystems, 4(3), 199-207. 1876-4029 https://hdl.handle.net/10356/95842 http://hdl.handle.net/10220/11352 10.2174/1876402911204030199 en Micro and nanosystems © 2012 Bentham Science Publishers. |
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Titanium nitride (TiN)/nickel (Ni) composite coatings were synthesized by plasma assisted metal-organic chemical vapour deposition (PAMOCVD) using organo-metallic and metal-organic complexes namely dichlorobis( 5- cyclopentadienyl)titanium (IV) for titanium and N,N'-ethylene-bis(2,4-pentanedion-iminoato)nickel(II) for nickel. The growth of such films was investigated in nitrogen (N2) plasma environment in the substrate temperature range of 450- 550ºC at a deposition pressure of 0.5-1 mbar. Prior to the deposition of films, the Ti precursor was subjected to the equilibrium vapour pressure measurements by employing TG/DTA in transpiration mode, which led to the value of 109.2 ± 5.6 kJ mol-1 for the standard enthalpy of sublimation (ΔHo sub). The phase identification using glancing incidence x-ray diffraction showed Ni/TiN is a nanocomposite coating containing nanocrystals of Ni and TiN with face centered cubic structure. Scanning electron microscopy revealed a uniform surface morphology of the films, while chemical analysis by energy dispersive analysis confirmed the presence of titanium, nickel and nitrogen in the composite films. |
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School of Chemical and Biomedical Engineering |
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School of Chemical and Biomedical Engineering Maiyalagan, Thandavarayan Arockiasamy, S. Kuppusami, P. Mallika, C. Nagaraja, K. S. |
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Maiyalagan, Thandavarayan Arockiasamy, S. Kuppusami, P. Mallika, C. Nagaraja, K. S. |
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Maiyalagan, Thandavarayan Arockiasamy, S. Kuppusami, P. Mallika, C. Nagaraja, K. S. Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
author_sort |
Maiyalagan, Thandavarayan |
title |
Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
title_short |
Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
title_full |
Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
title_fullStr |
Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
title_full_unstemmed |
Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
title_sort |
deposition of ni/tin composite coatings by a plasma assisted mocvd using an organometallic precursor |
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2013 |
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https://hdl.handle.net/10356/95842 http://hdl.handle.net/10220/11352 |
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