Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor

• Main Authors: Maiyalagan, Thandavarayan, Arockiasamy, S., Kuppusami, P., Mallika, C., Nagaraja, K. S.
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/95842; http://hdl.handle.net/10220/11352
• Institution: Nanyang Technological University

Titanium nitride (TiN)/nickel (Ni) composite coatings were synthesized by plasma assisted metal-organic chemical vapour deposition (PAMOCVD) using organo-metallic and metal-organic complexes namely dichlorobis( 5- cyclopentadienyl)titanium (IV) for titanium and N,N'-ethylene-bis(2,4-pentanedion...