Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An i...
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sg-ntu-dr.10356-962362020-03-07T14:02:42Z Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater Ang, Wan Chia Soe, Oak Tan, Chuan Seng Kropelnicki, P. Ling, Joyce H. L. Randles, A. B. Hum, A. J. W. Tsai, J. M. L. Tay, Andrew A. O. Leong, K. C. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An infrared (IR) camera with 5 µm resolution was employed to verify the temperature uniformity across the gauge section of the test structure. With this micro-heater-integrated test structure, micro-tensile tests can be performed at elevated temperatures using any conventional tensile testing system without any major modification to the system. In this study, the tensile test of the single crystal silicon (SCS) thin film with (1 0 0) surface orientation and 〈1 1 0〉 tensile direction was performed at room temperature and elevated temperatures, up to 300 °C. Experimental results for Young's modulus as a function of temperature are presented. A micro-sized SCS film showed a low dependence of mechanical properties on temperature up to 300 °C. 2013-07-15T08:15:47Z 2019-12-06T19:27:39Z 2013-07-15T08:15:47Z 2019-12-06T19:27:39Z 2012 2012 Journal Article Ang, W. C., Kropelnicki, P., Soe, O., Ling, J. H. L., Randles, A. B., Hum, A. J. W., et al. (2012). Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater. Journal of micromechanics and microengineering, 22(8), 085015-. https://hdl.handle.net/10356/96236 http://hdl.handle.net/10220/11462 10.1088/0960-1317/22/8/085015 en Journal of micromechanics and microengineering © 2012 IOP Publishing Ltd. |
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DRNTU::Engineering::Electrical and electronic engineering Ang, Wan Chia Soe, Oak Tan, Chuan Seng Kropelnicki, P. Ling, Joyce H. L. Randles, A. B. Hum, A. J. W. Tsai, J. M. L. Tay, Andrew A. O. Leong, K. C. Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
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This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An infrared (IR) camera with 5 µm resolution was employed to verify the temperature uniformity across the gauge section of the test structure. With this micro-heater-integrated test structure, micro-tensile tests can be performed at elevated temperatures using any conventional tensile testing system without any major modification to the system. In this study, the tensile test of the single crystal silicon (SCS) thin film with (1 0 0) surface orientation and 〈1 1 0〉 tensile direction was performed at room temperature and elevated temperatures, up to 300 °C. Experimental results for Young's modulus as a function of temperature are presented. A micro-sized SCS film showed a low dependence of mechanical properties on temperature up to 300 °C. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Ang, Wan Chia Soe, Oak Tan, Chuan Seng Kropelnicki, P. Ling, Joyce H. L. Randles, A. B. Hum, A. J. W. Tsai, J. M. L. Tay, Andrew A. O. Leong, K. C. |
format |
Article |
author |
Ang, Wan Chia Soe, Oak Tan, Chuan Seng Kropelnicki, P. Ling, Joyce H. L. Randles, A. B. Hum, A. J. W. Tsai, J. M. L. Tay, Andrew A. O. Leong, K. C. |
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Ang, Wan Chia |
title |
Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
title_short |
Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
title_full |
Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
title_fullStr |
Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
title_full_unstemmed |
Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
title_sort |
novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater |
publishDate |
2013 |
url |
https://hdl.handle.net/10356/96236 http://hdl.handle.net/10220/11462 |
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1681037257129066496 |