Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater

This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An i...

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Main Authors: Ang, Wan Chia, Soe, Oak, Tan, Chuan Seng, Kropelnicki, P., Ling, Joyce H. L., Randles, A. B., Hum, A. J. W., Tsai, J. M. L., Tay, Andrew A. O., Leong, K. C.
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
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Online Access:https://hdl.handle.net/10356/96236
http://hdl.handle.net/10220/11462
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-962362020-03-07T14:02:42Z Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater Ang, Wan Chia Soe, Oak Tan, Chuan Seng Kropelnicki, P. Ling, Joyce H. L. Randles, A. B. Hum, A. J. W. Tsai, J. M. L. Tay, Andrew A. O. Leong, K. C. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An infrared (IR) camera with 5 µm resolution was employed to verify the temperature uniformity across the gauge section of the test structure. With this micro-heater-integrated test structure, micro-tensile tests can be performed at elevated temperatures using any conventional tensile testing system without any major modification to the system. In this study, the tensile test of the single crystal silicon (SCS) thin film with (1 0 0) surface orientation and 〈1 1 0〉 tensile direction was performed at room temperature and elevated temperatures, up to 300 °C. Experimental results for Young's modulus as a function of temperature are presented. A micro-sized SCS film showed a low dependence of mechanical properties on temperature up to 300 °C. 2013-07-15T08:15:47Z 2019-12-06T19:27:39Z 2013-07-15T08:15:47Z 2019-12-06T19:27:39Z 2012 2012 Journal Article Ang, W. C., Kropelnicki, P., Soe, O., Ling, J. H. L., Randles, A. B., Hum, A. J. W., et al. (2012). Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater. Journal of micromechanics and microengineering, 22(8), 085015-. https://hdl.handle.net/10356/96236 http://hdl.handle.net/10220/11462 10.1088/0960-1317/22/8/085015 en Journal of micromechanics and microengineering © 2012 IOP Publishing Ltd.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Ang, Wan Chia
Soe, Oak
Tan, Chuan Seng
Kropelnicki, P.
Ling, Joyce H. L.
Randles, A. B.
Hum, A. J. W.
Tsai, J. M. L.
Tay, Andrew A. O.
Leong, K. C.
Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
description This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An infrared (IR) camera with 5 µm resolution was employed to verify the temperature uniformity across the gauge section of the test structure. With this micro-heater-integrated test structure, micro-tensile tests can be performed at elevated temperatures using any conventional tensile testing system without any major modification to the system. In this study, the tensile test of the single crystal silicon (SCS) thin film with (1 0 0) surface orientation and 〈1 1 0〉 tensile direction was performed at room temperature and elevated temperatures, up to 300 °C. Experimental results for Young's modulus as a function of temperature are presented. A micro-sized SCS film showed a low dependence of mechanical properties on temperature up to 300 °C.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Ang, Wan Chia
Soe, Oak
Tan, Chuan Seng
Kropelnicki, P.
Ling, Joyce H. L.
Randles, A. B.
Hum, A. J. W.
Tsai, J. M. L.
Tay, Andrew A. O.
Leong, K. C.
format Article
author Ang, Wan Chia
Soe, Oak
Tan, Chuan Seng
Kropelnicki, P.
Ling, Joyce H. L.
Randles, A. B.
Hum, A. J. W.
Tsai, J. M. L.
Tay, Andrew A. O.
Leong, K. C.
author_sort Ang, Wan Chia
title Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
title_short Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
title_full Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
title_fullStr Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
title_full_unstemmed Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
title_sort novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater
publishDate 2013
url https://hdl.handle.net/10356/96236
http://hdl.handle.net/10220/11462
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