Novel development of the micro-tensile test at elevated temperature using a test structure with integrated micro-heater

• Main Authors: Ang, Wan Chia, Soe, Oak, Tan, Chuan Seng, Kropelnicki, P., Ling, Joyce H. L., Randles, A. B., Hum, A. J. W., Tsai, J. M. L., Tay, Andrew A. O., Leong, K. C.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/96236; http://hdl.handle.net/10220/11462
• Institution: Nanyang Technological University

This paper describes the novel development of a micro-tensile testing method that allows testing at elevated temperatures. Instead of using a furnace, a titanium/platinum thin film micro-heater was fabricated on a conventional dog-bone-shaped test structure to heat up its gauge section locally. An i...