Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN

Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN

10.1016/S0965-9773(99)00209-3

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Bibliographic Details
Main Authors: Martínez-Miranda, L.J., Li, Y., Chow, G.M., Kurihara, L.K.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/106997
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Institution: National University of Singapore
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Summary:10.1016/S0965-9773(99)00209-3

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