Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN
10.1016/S0965-9773(99)00209-3
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2014
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sg-nus-scholar.10635-1069972023-10-30T20:08:16Z Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN Martínez-Miranda, L.J. Li, Y. Chow, G.M. Kurihara, L.K. MATERIALS SCIENCE 10.1016/S0965-9773(99)00209-3 Nanostructured Materials 12 5 653-656 NMAEE 2014-10-29T08:38:03Z 2014-10-29T08:38:03Z 1999 Article Martínez-Miranda, L.J., Li, Y., Chow, G.M., Kurihara, L.K. (1999). Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN. Nanostructured Materials 12 (5) : 653-656. ScholarBank@NUS Repository. https://doi.org/10.1016/S0965-9773(99)00209-3 09659773 http://scholarbank.nus.edu.sg/handle/10635/106997 000081912200015 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1016/S0965-9773(99)00209-3 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Martínez-Miranda, L.J. Li, Y. Chow, G.M. Kurihara, L.K. |
| format |
Article |
| author |
Martínez-Miranda, L.J. Li, Y. Chow, G.M. Kurihara, L.K. |
| spellingShingle |
Martínez-Miranda, L.J. Li, Y. Chow, G.M. Kurihara, L.K. Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN |
| author_sort |
Martínez-Miranda, L.J. |
| title |
Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN |
| title_short |
Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN |
| title_full |
Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN |
| title_fullStr |
Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN |
| title_full_unstemmed |
Depth profile study of the structure and strain distribution in chemically grown Cu films on AlN |
| title_sort |
depth profile study of the structure and strain distribution in chemically grown cu films on aln |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/106997 |
| _version_ |
1781788319670075392 |