Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface

10.1063/1.1347396

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Main Authors:	Tok, E.S., Hartell, A.D., Zhang, J.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/107085
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1070852023-10-26T21:11:58Z Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface Tok, E.S. Hartell, A.D. Zhang, J. MATERIALS SCIENCE 10.1063/1.1347396 Applied Physics Letters 78 7 919-921 APPLA 2014-10-29T08:39:17Z 2014-10-29T08:39:17Z 2001-02-12 Article Tok, E.S., Hartell, A.D., Zhang, J. (2001-02-12). Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface. Applied Physics Letters 78 (7) : 919-921. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1347396 00036951 http://scholarbank.nus.edu.sg/handle/10635/107085 000166772600023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1347396
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Tok, E.S. Hartell, A.D. Zhang, J.
format	Article
author	Tok, E.S. Hartell, A.D. Zhang, J.
spellingShingle	Tok, E.S. Hartell, A.D. Zhang, J. Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
author_sort	Tok, E.S.
title	Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
title_short	Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
title_full	Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
title_fullStr	Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
title_full_unstemmed	Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
title_sort	kinetics of si growth from hydride precursors on as-passivated si(001) surface
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/107085
_version_	1781788336250159104

Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface

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