Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface

10.1063/1.1347396

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Bibliographic Details
Main Authors: Tok, E.S., Hartell, A.D., Zhang, J.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107085
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Institution: National University of Singapore
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