Transmission electron microscopy of defects in NMOS and PMOS structures
10.1117/12.280546
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2014
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sg-nus-scholar.10635-1073232023-10-26T21:51:20Z Transmission electron microscopy of defects in NMOS and PMOS structures Bourdillon, A.J. Koh, Y.G. Chiang, S.L. Lim, C.W. Kong, J.R. Cao, G. MATERIALS SCIENCE NMOS PMOS TEM 10.1117/12.280546 Proceedings of SPIE - The International Society for Optical Engineering 3183 236-242 PSISD 2014-10-29T08:42:42Z 2014-10-29T08:42:42Z 1997 Conference Paper Bourdillon, A.J., Koh, Y.G., Chiang, S.L., Lim, C.W., Kong, J.R., Cao, G. (1997). Transmission electron microscopy of defects in NMOS and PMOS structures. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 236-242. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280546 0277786X http://scholarbank.nus.edu.sg/handle/10635/107323 A1997BJ57L00025 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
NMOS PMOS TEM |
| spellingShingle |
NMOS PMOS TEM Bourdillon, A.J. Koh, Y.G. Chiang, S.L. Lim, C.W. Kong, J.R. Cao, G. Transmission electron microscopy of defects in NMOS and PMOS structures |
| description |
10.1117/12.280546 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Bourdillon, A.J. Koh, Y.G. Chiang, S.L. Lim, C.W. Kong, J.R. Cao, G. |
| format |
Conference or Workshop Item |
| author |
Bourdillon, A.J. Koh, Y.G. Chiang, S.L. Lim, C.W. Kong, J.R. Cao, G. |
| author_sort |
Bourdillon, A.J. |
| title |
Transmission electron microscopy of defects in NMOS and PMOS structures |
| title_short |
Transmission electron microscopy of defects in NMOS and PMOS structures |
| title_full |
Transmission electron microscopy of defects in NMOS and PMOS structures |
| title_fullStr |
Transmission electron microscopy of defects in NMOS and PMOS structures |
| title_full_unstemmed |
Transmission electron microscopy of defects in NMOS and PMOS structures |
| title_sort |
transmission electron microscopy of defects in nmos and pmos structures |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/107323 |
| _version_ |
1781788376250187776 |