Transmission electron microscopy of defects in NMOS and PMOS structures

• Main Authors: Bourdillon, A.J., Koh, Y.G., Chiang, S.L., Lim, C.W., Kong, J.R., Cao, G.
• Other Authors: MATERIALS SCIENCE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: NMOS; PMOS; TEM
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/107323
• Institution: National University of Singapore

10.1117/12.280546