Transmission electron microscopy of defects in NMOS and PMOS structures

Transmission electron microscopy of defects in NMOS and PMOS structures

10.1117/12.280546

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Bibliographic Details
Main Authors: Bourdillon, A.J., Koh, Y.G., Chiang, S.L., Lim, C.W., Kong, J.R., Cao, G.
Other Authors: MATERIALS SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
NMOS
PMOS
TEM
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107323
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/107323

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