Fabrication of free standing resolution standards using proton beam writing

10.1016/j.nimb.2007.02.065

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Bibliographic Details
Main Authors:	Zhang, F., van Kan, J.A., Chiam, S.Y., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	DUV Ni grid Proton beam writing Resolution standards
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/112599
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-112599
record_format	dspace
spelling	sg-nus-scholar.10635-1125992023-10-26T08:56:44Z Fabrication of free standing resolution standards using proton beam writing Zhang, F. van Kan, J.A. Chiam, S.Y. Watt, F. PHYSICS NUS NANOSCIENCE & NANOTECH INITIATIVE DUV Ni grid Proton beam writing Resolution standards 10.1016/j.nimb.2007.02.065 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 474-478 NIMBE 2014-11-28T06:33:17Z 2014-11-28T06:33:17Z 2007-07 Article Zhang, F., van Kan, J.A., Chiam, S.Y., Watt, F. (2007-07). Fabrication of free standing resolution standards using proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 474-478. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.065 0168583X http://scholarbank.nus.edu.sg/handle/10635/112599 000248264900092 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	DUV Ni grid Proton beam writing Resolution standards
spellingShingle	DUV Ni grid Proton beam writing Resolution standards Zhang, F. van Kan, J.A. Chiam, S.Y. Watt, F. Fabrication of free standing resolution standards using proton beam writing
description	10.1016/j.nimb.2007.02.065
author2	PHYSICS
author_facet	PHYSICS Zhang, F. van Kan, J.A. Chiam, S.Y. Watt, F.
format	Article
author	Zhang, F. van Kan, J.A. Chiam, S.Y. Watt, F.
author_sort	Zhang, F.
title	Fabrication of free standing resolution standards using proton beam writing
title_short	Fabrication of free standing resolution standards using proton beam writing
title_full	Fabrication of free standing resolution standards using proton beam writing
title_fullStr	Fabrication of free standing resolution standards using proton beam writing
title_full_unstemmed	Fabrication of free standing resolution standards using proton beam writing
title_sort	fabrication of free standing resolution standards using proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/112599
_version_	1781789100966150144

Fabrication of free standing resolution standards using proton beam writing

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