Fabrication of free standing resolution standards using proton beam writing

Fabrication of free standing resolution standards using proton beam writing

10.1016/j.nimb.2007.02.065

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Bibliographic Details
Main Authors:	Zhang, F., van Kan, J.A., Chiam, S.Y., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	DUV Ni grid Proton beam writing Resolution standards
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/112599
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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