High-resolution synchrotron X-ray reflectivity study of the density of plasma-treated ultra low-k films

10.1016/j.surfcoat.2004.10.114

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Bibliographic Details
Main Authors: Yang, P., Lu, D., Murthy, B.R., Moser, H.O.
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113020
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Institution: National University of Singapore
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