The fabrication of x-ray masks using proton beam writing

10.1088/0960-1317/18/8/085010

Saved in:

Bibliographic Details
Main Authors:	Yue, W., Chiam, S.-Y., Ren, Y., Van Kan, J.A., Osipowicz, T., Jian, L., Moser, H.O., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113042
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Description
Summary:	10.1088/0960-1317/18/8/085010

Similar Items