The fabrication of x-ray masks using proton beam writing
10.1088/0960-1317/18/8/085010
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2014
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sg-nus-scholar.10635-1130422023-10-26T21:14:44Z The fabrication of x-ray masks using proton beam writing Yue, W. Chiam, S.-Y. Ren, Y. Van Kan, J.A. Osipowicz, T. Jian, L. Moser, H.O. Watt, F. PHYSICS SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1088/0960-1317/18/8/085010 Journal of Micromechanics and Microengineering 18 8 - JMMIE 2014-11-28T08:43:36Z 2014-11-28T08:43:36Z 2008-08-01 Article Yue, W., Chiam, S.-Y., Ren, Y., Van Kan, J.A., Osipowicz, T., Jian, L., Moser, H.O., Watt, F. (2008-08-01). The fabrication of x-ray masks using proton beam writing. Journal of Micromechanics and Microengineering 18 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/8/085010 09601317 http://scholarbank.nus.edu.sg/handle/10635/113042 000257891600012 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1088/0960-1317/18/8/085010 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Yue, W. Chiam, S.-Y. Ren, Y. Van Kan, J.A. Osipowicz, T. Jian, L. Moser, H.O. Watt, F. |
| format |
Article |
| author |
Yue, W. Chiam, S.-Y. Ren, Y. Van Kan, J.A. Osipowicz, T. Jian, L. Moser, H.O. Watt, F. |
| spellingShingle |
Yue, W. Chiam, S.-Y. Ren, Y. Van Kan, J.A. Osipowicz, T. Jian, L. Moser, H.O. Watt, F. The fabrication of x-ray masks using proton beam writing |
| author_sort |
Yue, W. |
| title |
The fabrication of x-ray masks using proton beam writing |
| title_short |
The fabrication of x-ray masks using proton beam writing |
| title_full |
The fabrication of x-ray masks using proton beam writing |
| title_fullStr |
The fabrication of x-ray masks using proton beam writing |
| title_full_unstemmed |
The fabrication of x-ray masks using proton beam writing |
| title_sort |
fabrication of x-ray masks using proton beam writing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113042 |
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1781789157197086720 |