The fabrication of x-ray masks using proton beam writing

The fabrication of x-ray masks using proton beam writing

10.1088/0960-1317/18/8/085010

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Bibliographic Details
Main Authors:	Yue, W., Chiam, S.-Y., Ren, Y., Van Kan, J.A., Osipowicz, T., Jian, L., Moser, H.O., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113042
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Institution:	National University of Singapore

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