A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry

10.1007/s00542-012-1571-4

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Bibliographic Details
Main Authors:	Zhao, J.M., Yang, P.
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113048
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Institution:	National University of Singapore

Description
Summary:	10.1007/s00542-012-1571-4

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