A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry
10.1007/s00542-012-1571-4
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/113048 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-113048 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-1130482023-10-26T09:43:27Z A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry Zhao, J.M. Yang, P. SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1007/s00542-012-1571-4 Microsystem Technologies 18 9-10 1455-1461 2014-11-28T08:43:41Z 2014-11-28T08:43:41Z 2012-09 Conference Paper Zhao, J.M., Yang, P. (2012-09). A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry. Microsystem Technologies 18 (9-10) : 1455-1461. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-012-1571-4 09467076 http://scholarbank.nus.edu.sg/handle/10635/113048 000307998800028 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1007/s00542-012-1571-4 |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Zhao, J.M. Yang, P. |
| format |
Conference or Workshop Item |
| author |
Zhao, J.M. Yang, P. |
| spellingShingle |
Zhao, J.M. Yang, P. A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| author_sort |
Zhao, J.M. |
| title |
A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| title_short |
A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| title_full |
A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| title_fullStr |
A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| title_full_unstemmed |
A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| title_sort |
method for determining ultrathin dlc film thickness by spectroscopic ellipsometry |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113048 |
| _version_ |
1781789158225739776 |