Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer

Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer

10.1088/0268-1242/15/8/309

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Bibliographic Details
Main Authors: Wang, S.J., Ong, C.K., You, L.P., Xu, S.Y.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113078
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Institution: National University of Singapore
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Summary:10.1088/0268-1242/15/8/309

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