Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer

10.1088/0268-1242/15/8/309

Saved in:

Bibliographic Details
Main Authors:	Wang, S.J., Ong, C.K., You, L.P., Xu, S.Y.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113078
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-113078
record_format	dspace
spelling	sg-nus-scholar.10635-1130782023-10-26T21:28:02Z Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer Wang, S.J. Ong, C.K. You, L.P. Xu, S.Y. PHYSICS INSTITUTE OF ENGINEERING SCIENCE 10.1088/0268-1242/15/8/309 Semiconductor Science and Technology 15 8 836-839 SSTEE 2014-11-28T09:11:44Z 2014-11-28T09:11:44Z 2000-08 Article Wang, S.J., Ong, C.K., You, L.P., Xu, S.Y. (2000-08). Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer. Semiconductor Science and Technology 15 (8) : 836-839. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/15/8/309 02681242 http://scholarbank.nus.edu.sg/handle/10635/113078 000088756200010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0268-1242/15/8/309
author2	PHYSICS
author_facet	PHYSICS Wang, S.J. Ong, C.K. You, L.P. Xu, S.Y.
format	Article
author	Wang, S.J. Ong, C.K. You, L.P. Xu, S.Y.
spellingShingle	Wang, S.J. Ong, C.K. You, L.P. Xu, S.Y. Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
author_sort	Wang, S.J.
title	Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
title_short	Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
title_full	Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
title_fullStr	Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
title_full_unstemmed	Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
title_sort	epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113078
_version_	1781789162932797440

Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer

Similar Items