Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures
10.1088/0957-4484/14/11/005
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2014
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sg-nus-scholar.10635-1130942023-10-25T22:10:16Z Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Tjiu, W.C. Zhang, J. INSTITUTE OF ENGINEERING SCIENCE MATERIALS SCIENCE PHYSICS 10.1088/0957-4484/14/11/005 Nanotechnology 14 11 1187-1191 NNOTE 2014-11-28T09:11:56Z 2014-11-28T09:11:56Z 2003-11 Article Lau, G.S., Tok, E.S., Liu, R., Wee, A.T.S., Tjiu, W.C., Zhang, J. (2003-11). Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures. Nanotechnology 14 (11) : 1187-1191. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/14/11/005 09574484 http://scholarbank.nus.edu.sg/handle/10635/113094 000187038400007 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1088/0957-4484/14/11/005 |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Tjiu, W.C. Zhang, J. |
| format |
Article |
| author |
Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Tjiu, W.C. Zhang, J. |
| spellingShingle |
Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Tjiu, W.C. Zhang, J. Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures |
| author_sort |
Lau, G.S. |
| title |
Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures |
| title_short |
Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures |
| title_full |
Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures |
| title_fullStr |
Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures |
| title_full_unstemmed |
Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures |
| title_sort |
nanostructure formation by o2 + ion sputtering of si/sige heterostructures |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113094 |
| _version_ |
1781789165623443456 |