Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures

10.1088/0957-4484/14/11/005

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Bibliographic Details
Main Authors:	Lau, G.S., Tok, E.S., Liu, R., Wee, A.T.S., Tjiu, W.C., Zhang, J.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113094
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Institution:	National University of Singapore

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