Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films

10.1063/1.1431435

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Bibliographic Details
Main Authors:	Choi, W.K., Natarajan, A., Bera, L.K., Wee, A.T.S., Liu, Y.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113098
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113098
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spelling	sg-nus-scholar.10635-1130982023-10-25T22:10:17Z Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films Choi, W.K. Natarajan, A. Bera, L.K. Wee, A.T.S. Liu, Y.J. ELECTRICAL & COMPUTER ENGINEERING INSTITUTE OF ENGINEERING SCIENCE PHYSICS 10.1063/1.1431435 Journal of Applied Physics 91 4 2443-2448 JAPIA 2014-11-28T09:11:59Z 2014-11-28T09:11:59Z 2002-02-15 Article Choi, W.K., Natarajan, A., Bera, L.K., Wee, A.T.S., Liu, Y.J. (2002-02-15). Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films. Journal of Applied Physics 91 (4) : 2443-2448. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1431435 00218979 http://scholarbank.nus.edu.sg/handle/10635/113098 000173553800107 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1431435
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Choi, W.K. Natarajan, A. Bera, L.K. Wee, A.T.S. Liu, Y.J.
format	Article
author	Choi, W.K. Natarajan, A. Bera, L.K. Wee, A.T.S. Liu, Y.J.
spellingShingle	Choi, W.K. Natarajan, A. Bera, L.K. Wee, A.T.S. Liu, Y.J. Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
author_sort	Choi, W.K.
title	Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
title_short	Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
title_full	Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
title_fullStr	Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
title_full_unstemmed	Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
title_sort	rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113098
_version_	1781789166367932416

Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films

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