SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates

10.1002/sia.1216

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Bibliographic Details
Main Authors:	Yeo, K.L., Wee, A.T.S., Liu, R., Ng, C.M., See, A.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Subjects:	Backside SIMS depth profiling Sample rotation Secondary ion mass spectrometry Silicon-on-insulator (SOI)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113102
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113102
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spelling	sg-nus-scholar.10635-1131022023-10-26T21:27:43Z SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates Yeo, K.L. Wee, A.T.S. Liu, R. Ng, C.M. See, A. INSTITUTE OF ENGINEERING SCIENCE PHYSICS Backside SIMS depth profiling Sample rotation Secondary ion mass spectrometry Silicon-on-insulator (SOI) 10.1002/sia.1216 Surface and Interface Analysis 33 5 373-375 SIAND 2014-11-28T09:12:02Z 2014-11-28T09:12:02Z 2002-05 Article Yeo, K.L., Wee, A.T.S., Liu, R., Ng, C.M., See, A. (2002-05). SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates. Surface and Interface Analysis 33 (5) : 373-375. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.1216 01422421 http://scholarbank.nus.edu.sg/handle/10635/113102 000175780000001 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Backside SIMS depth profiling Sample rotation Secondary ion mass spectrometry Silicon-on-insulator (SOI)
spellingShingle	Backside SIMS depth profiling Sample rotation Secondary ion mass spectrometry Silicon-on-insulator (SOI) Yeo, K.L. Wee, A.T.S. Liu, R. Ng, C.M. See, A. SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
description	10.1002/sia.1216
author2	INSTITUTE OF ENGINEERING SCIENCE
author_facet	INSTITUTE OF ENGINEERING SCIENCE Yeo, K.L. Wee, A.T.S. Liu, R. Ng, C.M. See, A.
format	Article
author	Yeo, K.L. Wee, A.T.S. Liu, R. Ng, C.M. See, A.
author_sort	Yeo, K.L.
title	SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
title_short	SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
title_full	SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
title_fullStr	SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
title_full_unstemmed	SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
title_sort	sims backside depth profiling of ultrashallow implants using silicon-on-insulator substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113102
_version_	1781789167344156672

SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substrates

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