Dynamics and surface segregation during GSMBE of Si1-yCy and Si1-x-yGexCy on the Si(0 0 1) surface

10.1016/S0022-0248(02)02219-4

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Bibliographic Details
Main Authors: Price, R.W., Tok, E.S., Liu, R., Wee, A.T.S., Woods, N.J., Zhang, J.
Other Authors: MATERIALS SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113113
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Institution: National University of Singapore