Synthesis of pure C40 TiSi2 for Si wafer fabrication

Synthesis of pure C40 TiSi2 for Si wafer fabrication

10.1117/12.456893

Saved in:

書目詳細資料
Main Authors:	Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S.
其他作者:	INSTITUTE OF ENGINEERING SCIENCE
格式:	Conference or Workshop Item
出版:	2014
主題:	0.1 μm technology C40 TiSi2 Laser thermal processing (LTP)
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/113120
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

相似書籍

Synthesis and characterization of pure C40 TiSi2
由: Chen, S.Y., et al.
出版: (2014)

Structural and mechanism studies of laser induced titanium disilicide
由: TAN SWEE CHING
出版: (2010)

Characterization of titanium silicide by Raman spectroscopy for submicron IC processing
由: Lim, E.H., et al.
出版: (2014)

Identification of refractory-metal-free C40 TiSi2 for low temperature C54 TiSi2 formation
由: Li, K., et al.
出版: (2014)

Enhancement Effect of C40 TiSi2 on the C54 Phase Formation
由: Chen, S.Y., et al.
出版: (2014)

SiN-SOI multilayer platform for prospective applications at 2 μm
由: Sia, Brian Jia Xu, et al.
出版: (2021)

The effect of film thickness on the C40 TiSi2 to C54 TiSi 2 transition temperature
由: Tan, S.C., et al.
出版: (2014)

Application of titanium silicide as an interconnect in deep submicron integrated chip manufacturing
由: TAN CHENG CHEH, DENNIS
出版: (2010)

Giáo dục 4.0: Mô hình trường học 4.0 đáp ứng xu thế phát triển của công nghiệp 4.0
由: Nguyễn, Thị Mỹ Lộc, et al.
出版: (2021)

Laser thermal processing of amorphous silicon gates to reduce poly-depletion in CMOS devices
由: Chong, Y.F., et al.
出版: (2014)

Structural study of refractory-metal-free C40 TiSi2 and its transformation to C54 TiSi2
由: Yu, T., et al.
出版: (2014)

Characterization of HfO2/Si(0 0 1) interface with high-resolution rutherford backscattering spectroscopy
由: Nakajima, K., et al.
出版: (2014)

Direct formation of C54 phase on the basis of C40 TiSi2 and its applications in deep sub-micron technology
由: Chen, S.Y., et al.
出版: (2014)

INMUCAL-Nutrients V.4.0
由: พรรณี พรประชานุวัฒน์
出版: (2020)

โปรแกรมคอมพิวเตอร์ Spiro Thai 4.0
由: วันชัย เดชสมฤทธิ์ฤทัย
出版: (2021)

Wideband 60GHz on-chip antenna with an artificial magnetic conductor
由: Chu, H., et al.
出版: (2014)

A new asymmetric SrCo0.8Fe0.1Ga0.1O3-δ perovskite hollow fiber membrane for stable oxygen permeability under reducing condition
由: Yang, N.-T., et al.
出版: (2014)

Contract-based Methodology for Developing Resilient Cyber-Infrastructure in the Industry 4.0 Era
由: Andalam, Sidharta, et al.
出版: (2018)

60-GHz AMC-based circularly polarized on-chip antenna using standard 0.18-μ m CMOS technology
由: Bao, X.-Y., et al.
出版: (2014)

Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates
由: Chen, S.Y., et al.
出版: (2014)

Intergenerational mobility in industry 4.0
由: Sy, Dominique Hannah A.
出版: (2022)

Compact, hybrid III-V/silicon Vernier laser diode operating from 1955-1992 nm
由: Sia, Brian Jia Xu, et al.
出版: (2021)

Bản chất cuộc cách mạng công nghiệp và công cuộc làm chủ thích ứng trong phát triển thư viện thời kỳ công nghệ 4.0
由: Vũ, Tiến Đức
出版: (2020)

Identifying the promising production planning and scheduling method for manufacturing in Industry 4.0: a literature review
由: Chen, Chen, et al.
出版: (2024)

Approaches to Higher Education Innovation in the Context of Industrial Revolution 4.0
由: Nguyen, Quynh Huy, et al.
出版: (2020)

Circular economy meets industry 4.0: Can big data drive industrial symbiosis?
由: Tseng, Ming Lang, et al.
出版: (2018)

Industry 4.0 to accelerate the circular economy: A case study of electric scooter sharing
由: Pham, Trang Thi, et al.
出版: (2019)

Laser induced transformation of TiSi2
由: Lu, L., et al.
出版: (2014)

ปัญหาในการนำนโยบายระบบราชการ 4.0 ไปปฏิบัติ กรณีศึกษา องค์กรปกครองส่วนท้องถิ่นในสามจังหวัดชายแดนภาคใต้
由: ภฤศวินท์ ชยาภิวัฒน์
出版: (2023)

What is your gig? Managing the pandemic and the role of HRM 4.0
由: Gutierrez, Alvin Neil A.
出版: (2021)

Industry 4.0 readiness among MSMEs
由: Lugtu, Reynaldo C., Jr.
出版: (2022)

Phát triển nguồn lực trí thức nữ trong bối cảnh Công nghiệp 4.0 tại Việt Nam
由: Hà, Diệu Linh, et al.
出版: (2020)

Developing a quick response product configuration system under industry 4.0 based on customer requirement modelling and optimization method
由: Lee, Ching-Hung, et al.
出版: (2020)

คู่มือการใช้โปรแกรม INMUCAL-Nutrients V.4.0 ฉบับปรับปรุง
由: อาริสา กีรติจำเริญ
出版: (2020)

Nanophotonics based cantilever sensor
由: Lee, C., et al.
出版: (2014)

Role of the Nucleus Incertus in Cognition
由: WU YOU
出版: (2014)

Cuộc cách mạng công nghiệp 4.0 và nhu cầu du lịch
由: Lê, Thị Thương
出版: (2020)

Thư viện tỉnh Bình Định hướng tới cuộc cách mạng công nghiệp 4.0
由: Võ, Văn Nhiếng
出版: (2020)

Operational excellence towards sustainable development goals through industry 4.0
由: Quezada, Luis E., et al.
出版: (2017)

Proliferation of meso-industrial revolutions: Is industry 4.0 just one of the waves?
由: Kim, Junmo, et al.
出版: (2018)