Activation of beryllium-implanted GaN by two-step annealing

Activation of beryllium-implanted GaN by two-step annealing

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Sun, Yuejun, Tan, Leng Seow, Chua, Soo Jin, Prakash, Savarimuthu
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/114538
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Institution: National University of Singapore
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Summary:Materials Research Society Symposium - Proceedings

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