Activation of beryllium-implanted GaN by two-step annealing

Activation of beryllium-implanted GaN by two-step annealing

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors:	Sun, Yuejun, Tan, Leng Seow, Chua, Soo Jin, Prakash, Savarimuthu
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/114538
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Institution:	National University of Singapore

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