Activation of beryllium-implanted GaN by two-step annealing

Materials Research Society Symposium - Proceedings

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Main Authors:	Sun, Yuejun, Tan, Leng Seow, Chua, Soo Jin, Prakash, Savarimuthu
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/114538
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-114538
record_format	dspace
spelling	sg-nus-scholar.10635-1145382015-01-16T00:48:27Z Activation of beryllium-implanted GaN by two-step annealing Sun, Yuejun Tan, Leng Seow Chua, Soo Jin Prakash, Savarimuthu ELECTRICAL ENGINEERING Materials Research Society Symposium - Proceedings 595 W3.82.1 - W3.82.7 MRSPD 2014-12-02T08:05:49Z 2014-12-02T08:05:49Z 2000 Conference Paper Sun, Yuejun,Tan, Leng Seow,Chua, Soo Jin,Prakash, Savarimuthu (2000). Activation of beryllium-implanted GaN by two-step annealing. Materials Research Society Symposium - Proceedings 595 : W3.82.1 - W3.82.7. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/114538 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Sun, Yuejun Tan, Leng Seow Chua, Soo Jin Prakash, Savarimuthu
format	Conference or Workshop Item
author	Sun, Yuejun Tan, Leng Seow Chua, Soo Jin Prakash, Savarimuthu
spellingShingle	Sun, Yuejun Tan, Leng Seow Chua, Soo Jin Prakash, Savarimuthu Activation of beryllium-implanted GaN by two-step annealing
author_sort	Sun, Yuejun
title	Activation of beryllium-implanted GaN by two-step annealing
title_short	Activation of beryllium-implanted GaN by two-step annealing
title_full	Activation of beryllium-implanted GaN by two-step annealing
title_fullStr	Activation of beryllium-implanted GaN by two-step annealing
title_full_unstemmed	Activation of beryllium-implanted GaN by two-step annealing
title_sort	activation of beryllium-implanted gan by two-step annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/114538
_version_	1681094843953053696

Activation of beryllium-implanted GaN by two-step annealing

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