Surface passivation of phosphorus-diffused n +-type emitters by plasma-assisted atomic-layer deposited Al 2O 3

• Main Authors: Hoex, B., van de Sanden, M.C.M., Schmidt, J., Brendel, R., Kessels, W.M.M.
• Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
• Format: Article
• Published: 2014
• Subjects: Aluminium oxide; N-type emitters; Solar cells; Surface passivation
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/114871
• Institution: National University of Singapore

10.1002/pssr.201105445