Surface passivation of phosphorus-diffused n +-type emitters by plasma-assisted atomic-layer deposited Al 2O 3

Surface passivation of phosphorus-diffused n +-type emitters by plasma-assisted atomic-layer deposited Al 2O 3

10.1002/pssr.201105445

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Bibliographic Details
Main Authors: Hoex, B., van de Sanden, M.C.M., Schmidt, J., Brendel, R., Kessels, W.M.M.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Article
Published: 2014
Subjects:
Aluminium oxide
N-type emitters
Solar cells
Surface passivation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/114871
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Institution: National University of Singapore

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