Surface passivation investigation on ultra-thin atomic layer deposited aluminum oxide layers for their potential application to form tunnel layer passivated contacts

Surface passivation investigation on ultra-thin atomic layer deposited aluminum oxide layers for their potential application to form tunnel layer passivated contacts

10.7567/JJAP.56.08MB14

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Bibliographic Details
Main Authors: Xin, Zheng, Ling, Zhi Peng, Nandakumar, Naomi, Kaur, Gurleen, Ke, Cangming, Liao, Baochen, Aberle, Armin G, Stangl, Rolf
Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
Format: Article
Language:English
Published: IOP PUBLISHING LTD 2019
Subjects:
Science & Technology
Physical Sciences
Physics, Applied
Physics
SOLAR-CELL PASSIVATION
N-TYPE
C-SI
AL2O3
SILICON
RECOMBINATION
Online Access:https://scholarbank.nus.edu.sg/handle/10635/155043
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Institution: National University of Singapore
Language: English

Internet

https://scholarbank.nus.edu.sg/handle/10635/155043

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