Surface passivation investigation on ultra-thin atomic layer deposited aluminum oxide layers for their potential application to form tunnel layer passivated contacts
10.7567/JJAP.56.08MB14
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| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
IOP PUBLISHING LTD
2019
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| Subjects: | |
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/155043 |
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| Institution: | National University of Singapore |
| Language: | English |