The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon
10.1088/0268-1242/19/7/027
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2014
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sg-nus-scholar.10635-1153202023-10-27T09:35:55Z The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon Yan, L. Kong, L.B. Ong, C.K. TEMASEK LABORATORIES PHYSICS INSTITUTE OF ENGINEERING SCIENCE 10.1088/0268-1242/19/7/027 Semiconductor Science and Technology 19 7 935-938 SSTEE 2014-12-12T07:14:04Z 2014-12-12T07:14:04Z 2004-07 Article Yan, L., Kong, L.B., Ong, C.K. (2004-07). The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon. Semiconductor Science and Technology 19 (7) : 935-938. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/19/7/027 02681242 http://scholarbank.nus.edu.sg/handle/10635/115320 000222622200031 Scopus |
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| description |
10.1088/0268-1242/19/7/027 |
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TEMASEK LABORATORIES |
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TEMASEK LABORATORIES Yan, L. Kong, L.B. Ong, C.K. |
| format |
Article |
| author |
Yan, L. Kong, L.B. Ong, C.K. |
| spellingShingle |
Yan, L. Kong, L.B. Ong, C.K. The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon |
| author_sort |
Yan, L. |
| title |
The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon |
| title_short |
The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon |
| title_full |
The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon |
| title_fullStr |
The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon |
| title_full_unstemmed |
The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon |
| title_sort |
effect of ultra-thin al 2o 3 layers on the dielectric properties of laalo 3 thin film on silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/115320 |
| _version_ |
1781789381373198336 |