Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y

• Main Authors: Tan, C.F., Lee, H., Liu, J.P., Quek, E., Chan, L., Chor, E.F.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/115501
• Institution: National University of Singapore

Proceedings - Electrochemical Society